Foundry ServicesEquipmentPad Conditioner Assembly

With services ranging from advanced process development to standard production CMP services, Axus Technology is equipped to provide customers with the precise process and development services they need.  With a fully equipped Class 100 cleanroom staffed by engineers with decades of semiconductor process experience, the Axus Technology team can process your small or large lots of production substrates, develop and combine custom thinning and planarization processes, and provide you with the rapid and economical results that you need.

Standard Process Services Include:

Axus Technology delivers leading-edge CMP, wafer thinning and wafer polishing solutions for semiconductor, MEMS and substrate applications. Axus Technology is the industry expert in providing material processing and CMP foundry services, process tools, and custom configured upgrades that are designed to meet your process and production requirements. 

Customer support services include tool upgrades, spare parts, and field service support for a range of CMP and wafer grinding tools, including installed legacy tools. Engineering services include process development, equipment modification and upgrade, and the value engineering of critical components.  Axus also manages surplus equipment transactions and the remarketing of excess spares and materials.  If it involves technical support for polish, grind or planarization, the engineers at Axus Technology have the experience to deliver results.









PROCESS DEVELOPMENT

We specialize in foundry and process services such as:

  • CMP               • Bonding
  • Polishing        • Wafer Grinding
  • Thinning         • Edge Grinding
  • Wafer/            • Edge Trim
    Substrate Cleaning

Click here for more information.

AXUS EVENTS

  • See Axus at the upcoming IMAPS Device Packaging Conference, March 12-13, Radisson Fort McDowell Resort and Casino, Scottsdale/Fountain Hills, Arizona, booth # 16.
  • Axus recently presented "Process Optimization of Grinding and CMP for Thinning of SI" at the International Conference on Planarization/CMP Technology in Grenoble, France. Click here to view the presentation
  • Paul Feeney from Axus Technology presenting “Back to the Future of CMP Non-uniformity” at the US CMP Users Group Seminar during Semicon in July 2012. Click here to view the presentation.

AXUS NEWS

Copyright © 2011 Axus Technology   |    7001 W. Erie St. Suite 1, Chandler, AZ 85226   |    Phone: (480) 705-8000   E-Mail: info@axustech.com