ONTRAK DSS-200 SERIES 1 POST CMP CLEANER

OnTrak DSS 200 Series 1 Double-sided PVA Scrubber is designed to clean 100mm to 200mm wafers. It provides consistent, ultra-clean processing for a wide variety of applications.

Standard Features Include:

  • Universal load station
  • Double sided PVA scrub
  • Dual brush boxes
  • Ammonia dispense
  • IR assisted spin dry station
  • Robotic unload
  • Vertical unload station
  • Touchscreen controls

Optional Features:

  • Megasonics at spin dry station
  • Wafer size kits for 100 to 200mm
  • Signal light tower

Process Applications:

The DSS-200 Series 1 is a proven, cost-effective cleaning system for the following applications.

  • Post-Chemical-Mechanical Polishing (CMP) Cleaning: Oxide, Polysilicon, Nitride, Tungsten, Aluminum and Copper
  • General purpose cleaning: post-CVD oxides, post-metallization, surface topography cleaning, trench cleaning
  • Silicon cleaning: prime silicon; reclaim silicon, fab monitor reclaim

For more information about contract refurbishment services, refurbished tools from Axus Technology, or field service for IPEC tools, please contact either Tim St. Marie or Barrie VanDevender at our Chandler, AZ facility.

Contact Axus Technology or your local Axus Technology Sales Representative to discuss how Axus can help you get the most from your equipment investment.

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