ONTRAK DSS-200 SERIES 2 POST CMP CLEANER

OnTrak DSS 200 Series 2 Double-sided PVA Scrubber offers production-proven cleaning results for particles as small as 0.125µm. Depending on the application, throughputs of 45-65 wafers per hour are attainable, making the DSS-200 Series 2 the most cost-effective wafer cleaning system for wafers from 150mm to 200mm.

Standard Features Include:

  • 200mm ergonomic load station
  • Double sided PVA scrub
  • Dual brush boxes
  • Ammonia dispense
  • IR assisted spin dry station
  • Robotic unload
  • Vertical unload station
  • Touchscreen controls

Optional Features:

  • Megasonics at spin dry station
  • Multiple chemical delivery system
  • Signal light tower

For more information about contract refurbishment services, refurbished tools from Axus Technology, or field service for IPEC tools, please contact either Tim St. Marie or Barrie VanDevender at our Chandler, AZ facility.

Contact Axus Technology or your local Axus Technology Sales Representative to discuss how Axus can help you get the most from your equipment investment.

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