The IPEC 676 provides the maximum CMP process flexibility using multiple orbital polishing stations.

Please contact Axus Technology to discuss your equipment needs or equipment parts.

Typical Configuration Includes:

• Three Cassette Tilter Load/Unload Station
• Advanced Pad Motion Control
• High Speed Polish Drive (0-600 RPM)
• Closed Loop Delta P Control
• End Point Detection System
• Stainless Steel Polish Bell
• Pad Conditioners (2)
• Upgraded 500MHz Pentium

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