IPEC 776 ORBITAL CMP TOOL

The IPEC 776 is the most widely installed dry-in, dry-out orbital CMP platform available.

Please contact Axus Technology to discuss your equipment needs or equipment parts.

Typical Configuration Includes:

  • Integrated Double Side PVA Cleaner
  • Three Cassette Tilter Load/Unload Station
  • Buff Station
  • Advanced Pad Motion Control
  • End Point Detection System
  • Stainless Steel Polish Bell
  • Pad Conditioners (2)
  • Upgraded 500MHz Pentium


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