IPEC 776 AUTOMATED CMP TOOL

The IPEC 776 is the most widely installed dry-in, dry-out orbital CMP platform available. The 776 includes a fully automated wafer handling system with a Spray Station Assembly used to remove slurry particulates and keep the wafers wet throughout the process.

Standard Features Include:

  • Four wafer planarizers
  • Integrated double side PVA cleaner
  • Three cassette tlter load/unload station
  • Buff station
  • Advanced pad motion control
  • High speed polish drive (0-600 RPM)
  • Closed loop delta P control
  • Endpoint detection system
  • Robot R1/R2/R3 equipped
  • Stainless steel polish bell
  • Pad conditioners (2)
  • Upgraded 500MHz Pentium

For more information about contract refurbishment services, refurbished tools from Axus Technology, or field service for IPEC tools, please contact either Tim St. Marie or Barrie VanDevender at our Chandler, AZ facility.

Contact Axus Technology or your local Axus Technology Sales Representative to discuss how Axus can help you get the most from your equipment investment.

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