STRASBAUGH 6CA CMP TOOL

Strasbaugh 6CA CMP toolStrasbaugh 6CA Chemical Mechanical Planarization tool is widely used for development and production CMP applications. The 6CA is compact and economical to use, while offering the similar basic functionality and table size found on automated tools.

Standard Features Include:

  • Timer control for:
    • Two stage polish
    • Two rinse cycles
  • User specified carrier size, up to 200mm standard
  • Manual load and unload
  • 22 inch platen size
  • Maximum spindle speed 245 RPM
  • Spindle torque rated to 1400 in / lbs.

For more information about contract refurbishment services, refurbished tools from Axus Technology, or field service for IPEC tools, please contact either Tim St. Marie or Barrie VanDevender at our Chandler, AZ facility.

Contact Axus Technology or your local Axus Technology Sales Representative to discuss how Axus can help you get the most from your equipment investment.

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