The Strasbaugh 6CA Chemical Mechanical Planarization tool is widely used for development and production CMP applications. The 6CA is compact and economical to use, while offering the similar basic functionality and table size found on automated tools.

Please contact Axus Technology to discuss your equipment needs or equipment parts.

Typical Configuration Includes:

• Timer control for:

  • Two stage polish
  • Two rinse cycles
• User specified carrier size, up to 200mm standard
• Manual load and unload
• 22 inch platen size
• Maximum spindle speed 245 RPM
• Spindle torque rated to 1400 in / lbs.

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