STRASBAUGH 6EC CMP SYSTEM

STRASBAUGH 6EC CMP SYSTEMStrasbaugh 6EC CMP System is an economical tool for CMP research, failure analysis, and low-volume production. Its semi-automatic operations are programmable through a color, touch-screen GUI for repeatable and accurate process control. The Model 6EC is the affordable solution, providing the benefits of state-of-the-art CMP at a low cost.

Standard Features Include:  

  • Closed-loop table and spindle RPM motors help ensure consistent process results.
  • Programmable pad conditioning increases the lifetime of the pad and improves WIWNU.
  • Minimal maintenance lowers the cost of ownership.
  • Small footprint offers convenience for small labs.
  • Pad conditioning system provides in-situ and/or ex-situ programmable selective pad conditioning for consistent removal rates and minimum non-uniformity.
  • 20 zones of Programmable control: dwell time, down force and RPM can be programmed for each zone. Pad conditioning can be done with a diamond plated disk or nylon brush.

Options:

  • ViPRR carriers reduce edge exclusion, control center-to-edge  uniformity, and improve overall performance and reliability.

For more information about contract refurbishment services, refurbished tools from Axus Technology, or field service for IPEC tools, please contact either Tim St. Marie or Barrie VanDevender at our Chandler, AZ facility.

Contact Axus Technology or your local Axus Technology Sales Representative to discuss how Axus can help you get the most from your equipment investment.

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