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Axus Technology
7001 W. Erie St.
Suite 1
Chandler, AZ 85226
480-705-8000 |
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| IPEC/Westech
Model 372M CMP System |
Axus Technology maintains
an inventory of high quality new, used and refurbished
process equipment. Standard specifications for these
systems are provided below. We also specialize in providing
engineering modifications and enhancements to these systems.
This capability enables us to configure these systems
for unique or non-standard applications, which may result
in changes or improvements to these specifications. Please
contact us to discuss your specific requirements.
Specifications:
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Fully
automated, single wafer polisher designed to accommodate
100mm to 200mm wafers |
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Features
automatic wafer loading/unloading, and is capable
of two-step polishing processing to maximize wafer
processing capability and quality |
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Suitable
for:
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- CMP
processing of oxide and other dielectrics, tungsten
and copper
- Silicon and
SOI polishing
- MEMS processing
- R&D and
high volume manufacturing
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Compatible
cleaning systems available |
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