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Axus Technology
7001 W. Erie St.
Suite 1
Chandler, AZ 85226
480-705-8000 |
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| IPEC/Westech
Model 472M CMP System |
Axus Technology maintains
an inventory of high quality new, used and refurbished
process equipment. Standard specifications for these
systems are provided below. We also specialize in providing
engineering modifications and enhancements to these systems.
This capability enables us to configure these systems
for unique or non-standard applications, which may result
in changes or improvements to these specifications. Please
contact us to discuss your specific requirements.
Specifications:
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Fully automated, single wafer
polisher designed to accommodate 100mm to 200mm wafers |
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Features automatic wafer loading/unloading,
and is capable of two-step polishing processing to maximize
wafer processing capability and quality |
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Includes APP1000 advanced pad profiler
pad conditioner |
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Suitable for: |
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- CMP processing of oxide and other dielectrics,
tungsten and copper
- Silicon and SOI polishing
- MEMS processing
- R&D and high volume manufacturing
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Options available include endpoint detection,
integrated metrology, and cleaning |
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