Gemini-2 Dual Slurry Delivery System

The Axus Technology Gemini-2 Dual Slurry Delivery System delivers a continuous supply of two precisely controlled CMP slurries in an exceptionally compact and economical package. The Axus Gemini-2 is well-suited for a broad range of production and development applications, anywhere where the efficient use of space and slurry are important.Gemini 2 slurry system

The Axus Gemini-2 slurry delivery system provides continuous delivery and mixing of two slurries, utilizing a pair of mix and delivery tanks for each slurry.  When used for continuous dispense, slurry dispenses from one tank while new slurry is prepared in the second tank.  Dispense and mix alternates between tanks continuously, allowing for uninterrupted on-demand slurry delivery.  This twinned-tank arrangement eliminates the need to mix large batches of slurry and reduces concerns about pot-life and chemical management stored slurry.  Eliminating the use of a day-tank for slurry storage also allows for an exceptionally compact footprint.

The Gemini-2 delivers two slurries with a footprint that is a small fraction of what a typical single slurry delivery system requires.  Occupying less than six square feet and with its two sets of twinned tanks, the system includes all of the needed slurry management features, including slurry humidification, nitrogen backfill and automated clean and purge capability.  Along with being simple to maintain, the system design supports rapid clean and changeover of slurry types.

The Axus Gemini-2 features include:

  • Industry standard magnetically levitated low-shear pumps provide for consistent delivery of fresh slurry.  
  • The user-friendly touch-screen controls deliver an intuitive user interface for slurry mix and delivery, as well as maintenance and slurry changeovers.  
  • The small package with large transparent access doors puts all of the critical components within view and easy reach, making the system easy to service and maintain.
  • Priced less than most single-slurry automated delivery systems.
  • The perfect solution, delivering tremendous savings in space, capital investment, and slurry cost.

Facilities Requirements

  • Dimensions:
    • Depth: 13.7” - 34 cm
    • Width: 63.5” - 162 cm
    • Height: 63” - 160 cm
  • Power: 110-240VAC - 50/60Hz
  • CDA Supply: 60-80 PSI, 2 CFM - 4.13 bar, 56 lpm
  • N2 Supply: 30 PSI, 5 CFM - 2 bar 142 lpm
  • DI Supply: 30-50 PSI, 2 GPM - 2-3.44 bar, 8.8 lpm
  • DI Return: <30 PSI, 2 GPM - <2 bar, 56.6 lpm
  • Slurry output: >0.6GPM - >5 lpm
  • Exhaust: 60 SCFM - 1.79 M3