Axus Technology maintains an inventory of high quality new, used and refurbished process equipment. Axus Technology systems meet or exceed original OEM specifications. We also specialize in providing engineering modifications and enhancements to these systems. This capability enables us to configure these systems for unique or non-standard applications, which may result in changes or improvements to these specifications.

Equipment Sales | Upgrades | Field Service

EQUIPMENT SALES

CMP

Wafer Grinding

Strasbaugh Model 7AF Wafer Grinder / Backgrinder Click for more Details	Strasbaugh Model 7AA Wafer Grinder / Backgrinder Click for more Details	Disco DFG850 System Click for more Details	Disco DFG860 System Click for more Details	Disco DFG8540 System Click for more Details
Disco DFG8560 System Click for more Details	Okamoto VG-502MKII8 Click for more Details	Okamoto VG-202MKII Click for more Details	Okamoto VG-201 Click for more Details	Okamoto GNX200 Click for more Details

Wafer / Substrate Cleaning

UPGRADES

Carrier Upgrades

Axus Technology improves the productivity and yield of a variety of SpeedFam and IPEC tools by applying proven carrier technology to legacy tools.  Working together with Strasbaugh, Axus has applied the established ViPRR multizone carrier to the SpeedFam Auriga platform, as well as the IPEC 372M and 472 tools.  With more than 400 ViPRR carriers having been installed worldwide, the improved edge exclusion and mutli-zone control delivers greater yield and productivity by using production proven hardware.  Moreover, the Auriga ViPRR upgrade eliminates the requirement for film lapping services or the use of costly template material.

ViPRR is a registered trademark of Strasbaugh  

FIELD SERVICE

Service Request Form

To submit a Service Request so that we may help you.

Please contact Axus Technology to discuss your equipment needs or equipment parts.