Axus Technology maintains an inventory of high quality new, used and refurbished process equipment. Axus Technology systems meet or exceed original OEM specifications. We also specialize in providing engineering modifications and enhancements to these systems. This capability enables us to configure these systems for unique or non-standard applications, which may result in changes or improvements to these specifications.

UPGRADES

Carrier Upgrades

Axus Technology improves the productivity and yield of a variety of SpeedFam and IPEC tools by applying proven carrier technology to legacy tools. Working together with Strasbaugh, Axus has applied the established ViPRR multizone carrier to the SpeedFam Auriga platform, as well as the IPEC 372M and 472 tools. With more than 400 ViPRR carriers having been installed worldwide, the improved edge exclusion and mutli-zone control delivers greater yield and productivity by using production proven hardware. Moreover, the Auriga ViPRR upgrade eliminates the requirement for film lapping services or the use of costly template material.

ViPRR is a registered trademark of Strasbaugh  

CUSTOMER SUPPORT SERVICES

Equipment Installation and Service

Based on our knowledge of the types of equipment we cover, we provide services to support this equipment at customer sites. These services include the installation of equipment in customer facilities, whether Axus Technology or other companies source the equipment. In many cases, members of our staff were the original developers or co-developers of the equipment, which gives us a high degree of specialized knowledge and technical competence to ensure the proper installation and operation of our customers’ equipment.

Field Service

Axus equipment comes with the same process and field support services that you expect from other quality suppliers. Tools come complete with source inspection, installation support, and service and parts warranty. Axus Technology also provides routine and emergency field service support and a range of training programs. The Axus team has unequalled expertise, with all technical team members having more than ten years of CMP or wafer grinding experience.

Repair Services (component repair, robot repair)

Axus Technology provides depot repair services for a number of different brands of robots, as well as for CMP tool components. All depot repairs include complete rebuild and upgrade services that include upgrading motors, encoders, and component parts and also re-plating or coating of all anodized or plated parts. Robots are returned to original or better operating condition. CMP component repair programs include pad conditioning arms, load stations, and other items requiring periodic maintenance. Axus technicians completely rebuild these units prior to shipment. All robots and CMP components receive their repair certification after they are fully tested and documented using dedicated test stations.

MOOG Parts Support

Axus Technology has responsibility for all OEM and end user support, including all sales and service activities, for a range of precision positioning products manufactured by Moog Industrial Group. Axus also offers service and support for Moog’s products installed on SCP wet benches and Moog systems used in the SpeedFam Auriga® product line. Moog’s Industrial Group designs and manufactures high performance motion control solutions combining electric, hydraulic, and hybrid technologies with expert consultative support in a range of applications including plastics, metal forming, power generation, test and simulation. Customers who need a high-value motion control and automation solution have regularly turned to the Moog’s precision positioning product line, widely used in applications such as semiconductor-handling equipment, automated welding systems and medical equipment. Visit www.moog.com for more information.

Replacement & Spare Parts

Axus maintains a spare parts inventory of several thousand components and assemblies. Our customers know that they can count on timely and high quality customer support.

To submit a Parts Request so that we may help you.

To submit a Service Request so that we may help you.

Please contact Axus Technology to discuss your equipment needs or equipment parts.