Foundry ServicesEquipmentPad Conditioner Assembly

With services ranging from advanced process development to standard production CMP services, Axus Technology is equipped to provide customers with the precise process and development services they need.  With a fully equipped Class 100 cleanroom staffed by engineers with decades of semiconductor process experience, the Axus Technology team can process your small or large lots of production substrates, develop and combine custom thinning and planarization processes, and provide you with the rapid and economical results that you need.

Axus Technology is now ITAR Registered.

Standard Process Services Include:

Axus Technology delivers leading-edge CMP, wafer thinning and wafer polishing solutions for semiconductor, MEMS/Nanofabrication, nanofabrication and substrate applications. Axus Technology is the industry expert in providing material processing and CMP foundry services, process tools, and custom configured upgrades that are designed to meet your process and production requirements. 

Customer support services include tool upgrades, robot repair , spare parts, and field service support for a range of CMP and wafer grinding tools, including installed legacy tools. Engineering services include process development, equipment modification and upgrade, and the value engineering of critical components.  Axus also manages surplus equipment transactions and the remarketing of excess spares and materials.  If it involves technical support for polish, grind or planarization, the engineers at Axus Technology have the experience to deliver results.


We specialize in foundry and process services such as:

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  • Exhibiting at Semicon Europa October 7 - 9, 2014, Grenoble, France (at the S3 Alliance booth, #854)
  • Exhibiting at IMAPS, San Diego, October 14 & 15, 2014, San Diego, CA
  • Exhibiting at IWLPC, San Jose, November 11 & 12, 2014, San Jose, CA
  • Presenting at International Conference on Planarization Technology, November 19 - 21, 2014, Kobe, Japan


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