Chandler, AZ May 6th, 2010 – Axus Technology has announced that the Middle East Technical University (METU) in Ankara, Turkey has installed a suite of advanced CMP and surface processing equipment purchased from Axus. The installation includes CMP and wafer thinning capability for 4 inch, 150mm, and 200mm substrates, supporting a wide range of semiconductor and alternate substrate processes.

As one of the premier technological research and education institutions in Turkey, the METU-MEMS Center has been aggressively expanding the range of technologies within its design and fabrication center. This tool set is one of several strategic technology additions undertaken by the METU-MEMS Research and Applications Center as part of their overall growth initiative.

"The tools delivered by Axus Technology will allow us to apply CMP, substrate thinning, and cleaning technologies to the various substrates and processes that our development projects require. Axus Technology was the single supplier that could deliver the process capability and support resources that we required," stated Prof. Tayfun Akin, Director of the METU-MEMS Research and Applications Center. "The Axus Technology team was recommended by several facilities, and worked with us to configure and install the flexible tool set that we needed," added Prof. Akin. "With the addition of the Axus tool set to the process equipment previously installed, the METU-MEMS Center now has a full range of MEMS process capabilities, making it possible for our researchers to broaden their research and enabling ever greater collaboration with our peer institutes worldwide. Continued technological additions are important to our mission of supporting leading edge research and the educational results at METU."

"We are delighted to be chosen to supply the suite of equipment at the METU-MEMS Center," stated Barrie VanDevender, VP of Sales and Marketing at Axus. "The breadth of process capability needed within METU created another opportunity for our engineering team to develop the process and hardware kits required by METU researchers. The METU-MEMS Center has installed an impressive technological base with a highly motivated group of researchers and engineers. We are proud to be selected to support their work."

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About Axus Technology

Axus Technology provides surface processing solutions for a range of semiconductor, MEMS, substrate, and related technologies. With a highly experienced engineering team, Axus Technology applies proven process technology to the production and development of CMP processes, advanced substrate development, and advanced packaging applications including 3-D integration and through-silicon-via processes. Along with providing support services for existing tools, Axus Technology delivers economical leading-edge equipment and process solutions that are precisely configured for end-user applications.

Based in Chandler, Arizona, Axus Technology operations include a fully-equipped development and foundry processing facility, as well as design, manufacture, and service operations. For more information visit our website at www.AxusTech.com.

About the METU-MEMS Research and Applications Center

The MEMS studies that started in 1995 in METU led to the establishment of the METU-MEMS Center, which has been continuing to expand in scale and capability and developing novel fabrication technologies for micro and nano-scale devices. The METU-MEMS Center has been adding new process equipment, including 0.35um lithography, deposition, dry etching, and surface processing, as well as adding capability for 150mm and 200mm substrates. The METU-MEMS Center is pursuing several development initiatives targeted at new technologies, such as Bio-MEMS and Power-MEMS, in addition to its ongoing RF MEMS, inertial sensors, and low cost CMOS infrared detector studies. Along with its own research activities, the METU-MEMS Center is actively involved with collaborative research in with international partners including, The University of Michigan, IMEC, IMTEK, LAAS, and ETH, Zurich. For more information about the METU-MEMS Center, please visit their website at www.mems.metu.edu.tr.

Press Contacts:

Barrie L. VanDevender
Vice President Sales & Marketing
Axus Technology
www.axustech.com
480-705-8000
info@axustech.com