Chandler, AZ – July 08, 2004 – Axus Technology, a global provider of semiconductor manufacturing equipment, parts, and engineering services for chemical mechanical planarization (CMP), wafer cleaning and wafer-thinning equipment users, today announced the delivery of CMP tools sets to two leading university labs. Both the University of Michigan Solid State Electronics Lab and the University of Arizona Microelectronics Laboratory selected Axus Technology for installation of CMP tools and related post-CMP cleaning tools.

“Axus Technology demonstrated the in-depth understanding of CMP processes necessary to support our nano-technology programs and was able to configure equipment to meet our particular requirements,” said Tim Brock, a senior research associate at the University of Michigan. “Axus also completely remanufactured the tools, providing us with leading-edge capability for much less than new equipment would have cost.” The University of Michigan will use the equipment provided by Axus Technology in a variety of research projects focused on nano technology. Projects are pursued and funded in partnership with corporate sponsors.

The University of Arizona installed additional CMP and cleaning tools provided by Axus Technology in its Tucson Microelectronics Lab, to supplement its existing CMP technology. “Axus Technology had been supporting our equipment and was able to provide our lab with the additional CMP tools necessary for expanding our efforts in planarization research,” said Dr. Victor Wells, the recently retired microelectronics lab manager. “We know we can count on Axus for quality equipment, parts and service.”

Axus Technology Vice President of Engineering Dan Trojan said, “We’re proud that many renowned university, industrial and government labs turn to us for a wide range of reliable equipment and support for their unique surface processing needs. These users help us in developing new product concepts and in increasing the productive life of legacy tools.”

The University of Michigan Solid State Electronics Lab in Ann Arbor is dedicated to facilitating research in all aspects of compound semiconductor and silicon microelectronics, micromachined devices, integrated circuits, microsystems, microfabrication technologies and semiconductor process control and manufacturing. For more information, visit: http://www.eecs.umich.edu/ssel/ .

The University of Arizona Microelectronics Laboratory is actively involved in research related to semiconductor processing, MEMS research, advanced packaging technology, and environmentally benign cleaning technologies. For details, visit: http://www.ece.arizona.edu.

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Axus Technology provides surface processing solutions for a range of semiconductor, MEMS, substrate, and related technologies. With a highly experienced engineering team, Axus Technology applies proven process technology to the production and development of CMP processes, advanced substrate development, and advanced packaging applications including 3-D integration and through-silicon-via processes. Along with providing support services for existing tools, Axus Technology delivers economical leading-edge equipment and process solutions that are precisely configured for end-user applications.

Based in Chandler, Arizona, Axus Technology operations include a fully-equipped development and foundry processing facility, as well as design, manufacture, and service operations. For more information visit our website at www.AxusTech.com.

Press Contacts:

Barrie L. VanDevender
Vice President Sales & Marketing
Axus Technology
www.axustech.com
480-705-8000

Tom Parish
Vice President of Marketing
Rite Track
www.ritetrack.com
513-645-8600