NEWS

Axus Technology and Berkeley Process Control Announce Service Partnership - Axus Technology to Provide Support for Legacy CMP Tool Users

Chandler , Ariz., July 7, 2004 – Axus Technology and Richmond, Calif.-based Berkeley Process Control, Inc., have announced the appointment of Axus Technology as a value added reseller for Berkeley products. Axus Technology, a global provider of equipment, parts, and engineering services for chemical mechanical planarization (CMP), wafer cleaning and wafer-thinning equipment users, will offer Berkeley control systems and components used on existing equipment throughout Asia and North America.

“Axus Technology’s expertise in CMP process and Berkeley control products, combined with their relationships with semiconductor equipment end users, make an excellent fit in terms of providing world-class service to system users,” said Lenson Wong, director of marketing at Berkeley. Berkeley and Axus have completed several projects in support of customers who use the SpeedFam Auriga ® product line. Axus Technology provides sales and engineering services to semiconductor fabs and maintains an inventory of Berkeley products for emergency support.

“We are pleased to expand our partnership with Berkeley to provide the exceptional service and technical expertise expected by users of CMP tools – a critical part of fab operations worldwide,” said Barrie VanDevender, Axus Technology’s vice president of sales and marketing.

Both companies expect to continue to grow their relationship as additional cooperative opportunities are developed.

Berkeley Process Control is a leading provider of flexible automation solutions to the semiconductor and other industries. Berkeley capabilities include multi-disciplinary engineering expertise to deliver motion, process and turn-key machine solutions. To learn more about Berkeley, visit www.berkeleyprocess.com.

Axus Technology is a Chandler, Ariz.-based global provider of equipment, parts, and engineering services for chemical mechanical planarization (CMP), wafer cleaning and wafer-thinning equipment users. For more information, visit www.axustech.com.