More than 350 CMP professionals, educators, management, and engineers from all over the globe came together from September 30 to October 2, at the Wildhorse Pass Hotel and Convention Center in Chandler, Arizona, for the 2015 International Conference on Planarization Technology. The annual ICPT Conference has become the premier gathering of the industry’s planarization leadership from the hands-on user community, research and development institutes and colleges and universities.
Presenting companies included: IBM, Intel, Ebara, AMAT, Dow Chemical, Cabot Microelectronics, Fraunhofer Institute, Tsinghua University, Micron Technology, TSMC, Samsung and Hynix with keynotes from Global Foundries and Dr. Klaus Beyer, an IBM Fellow (retired). Innovation, improvement, and increased productivity underlined nearly all of the presentations.
The conference was also the perfect setting for this technology leading organization to honor Dr. Klaus Beyer, a retired IBM Fellow, with the organization’s first-ever “Lifetime Achievement Award” for outstanding contribution to the science and technology of the Chemical Mechanical Planarization process.