Customer Support Services

Replacement & Spare Parts 

Axus maintains a spare parts inventory of several thousand components and assemblies. Our customers know that they can count on timely and high quality customer support.

MOOG Parts Support 

Axus Technology has responsibility for all OEM and end user support, including all sales and service activities, for a range of precision positioning products manufactured by Moog Industrial Group. Axus also offers service and support for Moog's products installed on SCP wet benches and Moog systems used in the SpeedFam Auriga® product line. Moog's Industrial Group designs and manufactures high performance motion control solutions combining electric, hydraulic, and hybrid technologies with expert consultative support in a range of applications including plastics, metal forming, power generation, test and simulation. Customers who need a high-value motion control and automation solution have regularly turned to the Moog's precision positioning product line, widely used in applications such as semiconductor-handling equipment, automated welding systems and medical equipment. Visit for more information.

Repair Services (component repair, robot repair 

Axus Technology provides depot repair services for a number of different brands of robots, as well as for CMP tool components. All depot repairs include complete rebuild and upgrade services that include upgrading motors, encoders, and component parts and also re-plating or coating of all anodized or plated parts. Robots are returned to original or better operating condition. CMP component repair programs include pad conditioning arms, load stations, and other items requiring periodic maintenance. Axus technicians completely rebuild these units prior to shipment. All robots and CMP components receive their repair certification after they are fully tested and documented using dedicated test stations.

Field Service 

Axus equipment comes with the same process and field support services that you expect from other quality suppliers. Tools come complete with source inspection, installation support, and service and parts warranty. Axus Technology also provides routine and emergency field service support and a range of training programs. The Axus team has unequalled expertise, with all technical team members having more than ten years of CMP or wafer grinding experience.

Equipment Installation and Service

Based on our knowledge of the types of equipment we cover, we provide services to support this equipment at customer sites. These services include the installation of equipment in customer facilities, whether Axus Technology or other companies source the equipment. In many cases, members of our staff were the original developers or co-developers of the equipment, which gives us a high degree of specialized knowledge and technical competence to ensure the proper installation and operation of our customers' equipment.